Micromachining and microfabrication process technology V (Santa Clara CA, 20-22 September 1999)Smith, James H; Karam, Jean-Michel.SPIE proceedings series. 1999, isbn 0-8194-3471-X, X, 434 p, isbn 0-8194-3471-XConference Proceedings

Binary optic diffuser designFEDOR, Adam.SPIE proceedings series. 2001, pp 378-385, isbn 0-8194-4285-2Conference Paper

The comparative analysis of silicon wafers micromachining versus nonconventional technologyULIERU, Dumitru Gh.SPIE proceedings series. 2001, pp 371-377, isbn 0-8194-4285-2Conference Paper

A wafer level chip size package with an air cavity above the active surface, for micromechanical applicationsBADIHI, Avner.SPIE proceedings series. 2000, pp 371-376, isbn 0-8194-3830-8Conference Paper

SOI micromachining technologies for MEMSRENARD, Stéphane.SPIE proceedings series. 2000, pp 193-199, isbn 0-8194-3830-8Conference Paper

Electrokinetic microfluidic systemsBOUSSE, L.SPIE proceedings series. 1999, pp 2-8, isbn 0-8194-3471-XConference Paper

MEMS/MOEMS application to optical communicationFUJITA, Hiroyuki.SPIE proceedings series. 2001, pp 11-17, isbn 0-8194-4285-2Conference Paper

Bulk micromachining for sensors and actuatorsESASHI, Masayoshi.SPIE proceedings series. 2000, pp 6-15, isbn 0-8194-3830-8Conference Paper

Success in MEMS, From DRIE Technology to Social InnovationKAMINAGA, Susumu.Symposium on design, test, integration and packaging of MEMS-MOEMS. 2011, pp 288-290, isbn 978-2-355-00013-3, 1Vol, 3 p.Conference Paper

ALC crystal oscillators based pressure and temperature measurement integrated circuit for high temperature oil well applicationsBIANCHI, Raul A; KARAM, Jean-Michel M; COURTOIS, Bernard et al.IEEE transactions on ultrasonics, ferroelectrics, and frequency control. 2000, Vol 47, Num 5, pp 1241-1245, issn 0885-3010Conference Paper

Patterning of diamond microstructures by bulk and surface micromachining for MEMS devicesYONGQING FU; HEJUN DU.SPIE proceedings series. 2001, pp 24-30, isbn 0-8194-4285-2Conference Paper

Application of Wireless Sensor Nodes to Commercial Power Consumption MonitoringITOH, Toshihiro; FUJIMOTO, Jun; MAEDA, Ryutaro et al.Symposium on design, test, integration and packaging of MEMS-MOEMS. 2011, pp 227-230, isbn 978-2-355-00013-3, 1Vol, 4 p.Conference Paper

Integrated Sensing Systems for Health and SafetyITAO, Kiyoshi; ITO, Toshihiro.Symposium on design, test, integration and packaging of MEMS-MOEMS. 2011, pp 212-216, isbn 978-2-355-00013-3, 1Vol, 5 p.Conference Paper

LINEAR ENERGY CONTROL OF LASER DRILLING AND ITS APPLICATION FOR TFT-LCD BRIGHT PIXEL REPAIRINGTACO CHEN; LIN, Ming-Tzer.Symposium on design, test, integration and packaging of MEMS-MOEMS. 2011, pp 330-333, isbn 978-2-355-00013-3, 1Vol, 4 p.Conference Paper

On-Wafer-Packaging of Crystal Quartz Based Devises Using Low-Temperature Anodic BondingZIMIN, Y; UEDA, T.Symposium on design, test, integration and packaging of MEMS-MOEMS. 2011, pp 148-151, isbn 978-2-355-00013-3, 1Vol, 4 p.Conference Paper

Mechanism of enzyme-etching dichromated gelatin and swelling of gelatinHONGBO LI; XIAOYANG HUANG.SPIE proceedings series. 2001, pp 471-476, isbn 0-8194-4285-2Conference Paper

Fabrication of electromagnetic micromirror arrayJANG, Yun-Ho; KIM, Yong-Kweon.SPIE proceedings series. 2001, pp 395-402, isbn 0-8194-4285-2Conference Paper

Fabrication of the refined MEMS-based compound grating (MCG) based on silicon micromachiningYAHONG YAO; BAI XU; CASTRACANE, James et al.SPIE proceedings series. 2001, pp 31-39, isbn 0-8194-4285-2Conference Paper

Prediction of particulate characteristics in an expanding laser plumeBLAIR, Dustin; TILLACK, Mark; ZAGHLOUL, Mofreh et al.SPIE proceedings series. 2001, pp 139-150, isbn 0-8194-4285-2Conference Paper

Ultra precision manufacturing of self-assembled micro systemsSHARON, André; BILSING, Axel; LEWIS, Gordon et al.SPIE proceedings series. 2001, pp 192-200, isbn 0-8194-4285-2Conference Paper

High aspect ratio microstructure fabrication using SU-8 resistZHU JUN; ZHAO XIAOLIN; NI ZHIPING et al.SPIE proceedings series. 2000, pp 86-89, isbn 0-8194-3830-8Conference Paper

Repair of stiction-failed, surface-micromachined polycrystalline silicon cantilevers using pulsed lasersPHINNEY, Leslie M; ROGERS, James W.SPIE proceedings series. 2000, pp 279-287, isbn 0-8194-3830-8Conference Paper

Thick porous silicon sacrificial layer formation using implanted mask technologySPLINTER, Alexandra; BARTELS, Olaf; BENECKE, Wolfgang et al.SPIE proceedings series. 2000, pp 172-180, isbn 0-8194-3830-8Conference Paper

Micropattern fabrication by specially designed micro toolAOKI, I; TAKAHASHI, T.SPIE proceedings series. 1999, pp 365-372, isbn 0-8194-3471-XConference Paper

Fabrication Methods for the Manufacture of Sapphire MicropartsALLEN, David M; REDONDO, Roxana; DANY, Maximilien et al.Symposium on design, test, integration and packaging of MEMS-MOEMS. 2011, pp 29-34, isbn 978-2-355-00013-3, 1Vol, 6 p.Conference Paper